Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen

Conformal films of amorphous iron(III) oxide and alpha-Fe2O3 have been coated oil zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367 degrees C and 534 degrees C. Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality, and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 angstrom per cycle. Energy dispersive spectroscopy, X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850 degrees C in air and N-2 atmospheres, alpha-Fe2O3 Was the predominant species. (C) 2008 Elsevier B.V. All rights reserved.