Formation of Two-Component Two-Phase Metal Films at Elevated Temperatures

被引：4

作者：

Begrambekov, L. B. ^{[1
]}

Gordeev, A. A. ^{[1
]}

Sadovskii, Ya. A. ^{[1
]}

机构：

[1] Moscow Engn Phys Inst State Univ, Moscow, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2008年 / 2卷 / 03期

关键词：

D O I：

10.1134/S1027451008030178

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

This paper is devoted to the study of two-component thin films deposited at elevated temperatures. The dependence of plasma-assisted film deposition from a flow of sputtered Cu and Fe atoms on the substrate temperature and type, concentration of sputtered components in the flow, and film thickness is investigated.

引用

页码：419 / 422

页数：4

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