STRUCTURE AND MECHANICAL PROPERTIES OF MULTILAYER COATINGS (TiAlCrY)N/ZrN

Multiperiodic nitride coatings (TiAlCrY)N/ZrN with different layer thicknesses are formed by vacuum-arc evaporation in a nitrogen atmosphere (0.2...0.6 Pa) of two targets, TiAlCrY and Zr. The targets were located along one straight line at equal distances from the perpendicular axis on which the substrates were placed. The rotation of the axis with the substrates was carried out either continuously or with a fixed delay at the evaporators. The duration of the process was chosen so that the total thickness of the coating (total thickness of the bilayers) was 10...11 mu m. The effect of nitrogen pressure and modulation period on the structural-phase state, elemental composition, and mechanical properties of multilayer coatings has been studied. An increase in the partial pressure of nitrogen and, consequently, its content in the coating leads to an increase in hardness. Reducing the thickness of the layers in the coatings increases the adhesive strength of the coatings and does not have a significant effect on the microstresses in the coating.