Sol-gel multimode interference power splitters

We report on the design and fabrication of 1 x 32 MMI power splitters through the sol-gel process. The MMI splitter is designed for 1.55-mu m wavelength and characterized in terms of tolerance, wavelength response, and polarization sensitivity. The splitter is then UV-imprinted in aluminosilicate material coated on SiO2. It is found that the responses of fabricated and designed splitter are in good agreement, with an excess loss of similar to 0.75 dB and power uniformity of similar to 0.95 dB.