共 50 条
- [31] Bloch Surface Wave Assisted Structured Illumination Microscopy for Sub-100 nm Resolution IEEE PHOTONICS JOURNAL, 2021, 13 (01):
- [38] Advanced module-based approach to effective CD prediction of sub-100 nm patterns DATA ANALYSIS AND MODELING FOR PROCESS CONTROL, 2004, 5378 : 65 - 73
- [39] Fabrication of sub-100 nm sized patterns on curved acryl substrate using a flexible stamp Japanese Journal of Applied Physics, 2008, 47 (5 PART 1): : 3699 - 3701
- [40] Patterning of 100 nm wide lines of polymer brushes by controlled etching of polydimethylsiloxane ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2006, 231