Towards a Particle Based Simulation of Complex Plasma Driven Nanocomposite Formation

被引：18
|
作者：
Bonitz, M. [1 ]
Rosenthal, L. [1 ]
Fujioka, K. [1 ]
Zaporojtchenko, V. [2 ]
Faupel, F. [2 ]
Kersten, H. [3 ]
机构：
[1] Univ Kiel, Inst Theoret Phys & Astrophys, D-24098 Kiel, Germany
[2] Univ Kiel, Inst Mat Wissensch Mat Verbunde, Tech Fak, D-24143 Kiel, Germany
[3] Univ Kiel, Inst Expt & Angew Phys, D-24098 Kiel, Germany
来源：
CONTRIBUTIONS TO PLASMA PHYSICS | 2012年 / 52卷 / 10期
关键词：
Metal clusters; nanocomposites; bulk and surface diffusion; agglomeration; Kinetic Monte Carlo; molecular dynamics; CONDENSATION COEFFICIENTS; GROWTH; DEPOSITION; DIFFUSION; METALS; CLUSTERS; IONS;
D O I：
10.1002/ctpp.201200038
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
An overview on particle-based simulation of nanocomposite formation in a magnetron plasma is given. After discussing recent kinetic Monte Carlo results for metal cluster growth and diffusion, new results for the simulation of co-sputtering of metal and polymer are presented. Then, the second method based on molecular dynamics is discussed and time-resolved results for the coalescence of two clusters in the plasma are shown. We conclude with an outlook on the prospects for an integrated simulation of cluster growth in the plasma coupled to the surface deposition phase (c) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
引用
收藏
页码：890 / 898
页数：9
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