Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays

被引：1

作者：

Drescher, J ^{[1
]}

Balke, H ^{[1
]}

Bahr, HA ^{[1
]}

Milde, G ^{[1
]}

Gerlach, G ^{[1
]}

机构：

[1] Tech Univ Dresden, Inst Solid State Mech, D-01062 Dresden, Germany

来源：

MOEMS AND MINIATURIZED SYSTEMS II | 2001年 / 4561卷

关键词：

pyroelectric sensor arrays; finite element method; coupled thermo-electro-mechanical fields;

D O I：

10.1117/12.443103

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For the example of a Lithiumtantalate (LiTaO3) sensor array, the coupled thermo-electro-mechanical fields are examined using the finite element method. The temperature distribution is computed in a preliminary thermal analysis, and the numerical results are compared with an analytical model. The calculated temperature field is used as input for a subsequent electro-mechanical analysis, where the thermo-elastic and the pyroelectric source terms axe simulated by body forces and body charges, respectively. The investigations of various FEM-models showed, that different mechanical boundary conditions and the piezoelectric coupling of LiTaO3 influence the electric system response by only about 6...7%.

引用

页码：333 / 338

页数：6

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