A Study of High Temperature DC and AC Gate Stressing on the Performance and Reliability of Power SiC MOSFETs

被引:17
|
作者
Green, Ron [1 ]
Lelis, A. J. [1 ]
El, M. [1 ]
Habersat, D. B. [1 ]
机构
[1] USA, Res Lab, Adelphi, MD 20783 USA
来源
SILICON CARBIDE AND RELATED MATERIALS 2012 | 2013年 / 740-742卷
关键词
MOSFET; reliability; BTS; interface traps; oxide traps; THRESHOLD-VOLTAGE; INSTABILITY; DEPENDENCE;
D O I
10.4028/www.scientific.net/MSF.740-742.549
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Although high-temperature measurements show a dramatic reduction in the bias-temperature stress-induced threshold-voltage instability of present state-of-the-art devices, a more thorough test methodology shows that several different conclusions may actually be drawn. The particular conclusion depends on the specific post-BTS measurement technique employed. Immediate room-temperature measurements suggest that significant oxide-trap activation may still be occurring. A significant, yet rapid, post-BTS recovery is observed as well. These results underline the importance of making both high-temperature and room-temperature measurements, as a function of stress and recovery time, to better ensure that the full effect of the BTS is observed. Initial AC BTS results suggest a similar level of device degradation as occurs from a DC BTS.
引用
收藏
页码:549 / 552
页数:4
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