Fabrication and Characterization of Silicon Photonic Waveguides and Devices via Selective Oxidation Process

被引：0

作者：

Wang, Xiaokun ^{[1
]}

Guan, Xiaowei ^{[1
]}

Shi, Yaocheng ^{[1
]}

Dai, Daoxin ^{[1
]}

机构：

[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, Zhejiang Prov Key Lab Sensing Technol, State Key Lab Modern Opt Instrumentat, Hangzhou 310058, Zhejiang, Peoples R China

来源：

2012 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP) | 2012年

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Silicon-on-insulator (SOI) optical waveguides are fabricated via selective oxidation process without any silicon etching step so that the waveguide surface becomes very smooth to achieve low-loss light propagation potentially. A high-Q ring-resonator is also demonstrated.

引用

页数：3

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