Intrinsic Tolerance to Total Ionizing Dose Radiation in Gate-All-Around MOSFETs

被引:22
|
作者
Comfort, Everett S. [1 ]
Rodgers, Martin P. [1 ]
Allen, William [1 ]
Gausepohl, Steve C. [1 ]
Zhang, Enxia X. [2 ]
Alles, Michael L. [2 ]
Hughes, Harold L. [3 ]
McMarr, Patrick J. [3 ]
Lee, Ji Ung [1 ]
机构
[1] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
[2] Vanderbilt Univ, Elect Engn & Comp Sci Dept, Nashville, TN 37235 USA
[3] US Naval Res Lab, Washington, DC 20375 USA
关键词
Gate-all-around; radiation effects; total ionizing dose; x-ray radiation; CHARGE;
D O I
10.1109/TNS.2013.2280247
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We measured the total ionizing dose response of gate-all-around silicon nanowire n- and pMOSFETs to x-ray doses up to 2Mrad(SiO2). We show that they are radiation hard, with no degradation in threshold voltage, off-state current, or subthreshold slope, even at the highest dose for a wide range of bias conditions. We attribute this to the intrinsically rad-hard feature of the gate-all-around device design, where the channel is no longer in contact with any insulating layers that could form a parasitic channel.
引用
收藏
页码:4483 / 4487
页数:5
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