Laser Integration with CMOS Assembly Process for Si Photonics

被引：0

作者：

Tseng, Ricky ^{[1
]}

O'Callaghan, James ^{[2
]}

Eid, Feras ^{[1
]}

Gleeson, Michael ^{[2
]}

Rawlings, Brandon ^{[1
]}

Kobrinsky, Mauro ^{[1
]}

Ban, Ibrahim ^{[1
]}

Nagle, Roger ^{[3
]}

McFarlane, William ^{[1
]}

Corbett, Brian ^{[2
]}

Chang, Peter ^{[1
]}

机构：

[1] Intel, Components Res, Technol Mfg Grp, Cork, Ireland

[2] Natl Univ Ireland Univ Coll Cork, Tyndall Natl Inst, Cork, Ireland

[3] Intel, Ireland Res, Cork, Ireland

来源：

2014 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2014年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High performance laser is integrated on Si substrates with evanescently coupled polymer waveguides. The design allows 2 mu m misalignment, consistent with CMOS assembly. 4 mu m gap and 8dB loss were demonstrated with improvement paths to <2dB loss.

引用

页数：3

共 50 条

[11] HELIOS: pHotonics ELectronics functional Integration on CMOS
Fedeli, Jean-Marc
Fulbert, Laurent
Van Thourhout, Dries
Viktorovitch, Pierre
O'Connor, Ian
Duan, Guang-Hua
Reed, Graham
Della Corte, Francesco
Vivien, Laurent
Lopez Royo, Francisco
Pavesi, Lorenzo
Garrido, Blas
Grard, Emmanuel
Tillack, Bernd
Zimmermann, Lars
Formont, Stephane
Hakansson, Andreas
Wachmann, Ewald
Zimmermann, Horst
Bakker, Arjen
Porte, Henri
SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS II, 2010, 7719
[12] Hybrid III-V/Si DFB laser integration on a 200 mm fully CMOS-compatible silicon photonics platform
Szelag, B.
Hassan, K.
Adelmini, L.
Ghegin, E.
Rodriguez, Ph.
Bensalem, S.
Nemouchi, F.
Bria, T.
Brihoum, M.
Brianceau, P.
Vermande, E.
Pesenti, O.
Schembri, A.
Crochemore, R.
Dominguez, S.
Roure, M. C.
Montmayeul, B.
Sanchez, L.
Jany, C.
2017 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2017,
[13] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si
Takenaka, M.
Kim, Y.
Han, J.
Kang, J.
Ikku, Y.
Cheng, Y.
Park, J. -K.
Kim, S. -H
Takagi, S.
2015 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2015,
[14] Monolithic integration of lattice-matched Ga(NAsP)-based laser structures on CMOS-compatible Si (001) wafers for Si-photonics applications
Volz, Kerstin
Ludewig, Peter
Stolz, Wolfgang
FUTURE DIRECTIONS IN SILICON PHOTONICS, 2019, 101 : 201 - 227
[15] Foundry's Perspective on Laser and SOA Module Integration with Si-Photonics
Li, Chao
Gao, Feng
Tan, James Y. S.
Lo, Guo-Qiang
2023 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION, OFC, 2023,
[16] Synthetic Dimension Photonics on a Si CMOS Platform
Balcytis, Armandas
Ozawa, Tomoki
Ota, Yasutomo
Iwamoto, Satoshi
Maeda, Jun
Baba, Toshihiko
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2021,
[17] Integration of Silicon Photonics in a Bulk CMOS Memory Flow
Meade, Roy
Tehar-Zahav, Ofer
Sternberg, Zvi
Megged, Efraim
Sandhu, Gurtej
Orcutt, Jason S.
Ram, Rajeev
Stojanovic, Vladimir
Watts, Michael R.
Timurdogan, Erman
Shainline, Jeffrey
Popovic, Milos
2013 IEEE OPTICAL INTERCONNECTS CONFERENCE, 2013, : 114 - +
[18] CMOS-Compatible Contact Technology for Si Photonics
Rodriguez, Philippe
Ghegin, Elodie
Nemouchi, Fabrice
2018 18TH INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT), 2018, : 41 - 46
[19] Integration of Silicon Photonics into DRAM Process
Shin, D. J.
Cho, K. S.
Ji, H. -C.
Lee, B. S.
Kim, S. G.
Bok, J. K.
Choi, S. H.
Shin, Y. H.
Kim, J. H.
Lee, S. Y.
Cho, K. Y.
Kuh, B. J.
Shin, J. H.
Lim, J. S.
Kim, J. M.
Choi, H. M.
Ha, K. H.
Park, Y. D.
Chung, C. H.
2013 OPTICAL FIBER COMMUNICATION CONFERENCE AND EXPOSITION AND THE NATIONAL FIBER OPTIC ENGINEERS CONFERENCE (OFC/NFOEC), 2013,
[20] Challenges of Si Photonics for on-chip Integration
Wada, K.
2009 35TH EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC), 2009,

← 1 2 3 4 5 →