Electron beams in capacitively coupled radio-frequency discharges

被引：49
|
作者：
Schulze, Julian [1 ]
Heil, Brian G. [1 ]
Luggenhoelscher, Dirk [1 ]
Czarnetzki, Uwe [1 ]
机构：
[1] V Ruhr Univ Bochum, Inst Expt Phys, D-44780 Bochum, Germany
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期
关键词：
capacitively coupled RF discharges; electron beams; phase resolved optical emission spectroscopy; plasma series resonance; stochastic heating;
D O I：
10.1109/TPS.2008.924404
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The generation of electron beams by the expanding sheath is observed experimentally in asymmetric single-frequency capacitively coupled radio-frequency discharges using phase-resolved optical-emission spectroscopy. Depending on the discharge geometry and conditions, such beams can propagate through the entire discharge and are reflected at the opposing plasma boundary. They are closely related to stochastic heating, and their generation is enhanced by the plasma-series-resonance effect. Confinement of these energetic electrons can lead to an effective heating of the plasma.
引用
收藏
页码：1400 / 1401
页数：2
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