Laser Terahertz Emission Microscopy toward High-Resolution Imaging

被引：0

作者：

Kim, Sunmi ^{[1
]}

Murakami, Hironaru ^{[1
]}

Tonouchi, Masayoshi ^{[1
]}

机构：

[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan

来源：

2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9 | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

As an unique terahertz application, we have been developing a laser terahertz emission microscope (LTEM) for not only a study of basic science but also industrial application such as an inspection tool for semiconductor integrated circuits. In order to establish high resolution system, we employed a high-refractive solid immersion lens and a beam expander in LTEM system, by which a focused beam spot size can be minimized effectively. Using the modified LTEM, nondestructive terahertz emission images of samples patterned as line-and-space structure on InP was obtained with a spatial resolution better than 1.5 mu m. (C) 2008 Optical Society of America

引用

页码：1113 / 1114

页数：2

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