Laser Terahertz Emission Microscopy toward High-Resolution Imaging

被引：0
|
作者：
Kim, Sunmi [1 ]
Murakami, Hironaru [1 ]
Tonouchi, Masayoshi [1 ]
机构：
[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
来源：
2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9 | 2008年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
As an unique terahertz application, we have been developing a laser terahertz emission microscope (LTEM) for not only a study of basic science but also industrial application such as an inspection tool for semiconductor integrated circuits. In order to establish high resolution system, we employed a high-refractive solid immersion lens and a beam expander in LTEM system, by which a focused beam spot size can be minimized effectively. Using the modified LTEM, nondestructive terahertz emission images of samples patterned as line-and-space structure on InP was obtained with a spatial resolution better than 1.5 mu m. (C) 2008 Optical Society of America
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页码：1113 / 1114
页数：2
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