Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

被引：8
|
作者：
Zhang, Chenchu [1 ]
Zhang, Jianming [1 ]
Chen, Renfei [1 ]
Li, Jiawen [2 ]
Wang, Chaowei [2 ]
Cao, Rui [3 ]
Zhang, Jingjing [4 ]
Ye, Hanchang [1 ]
Zhai, Hua [1 ]
Sugioka, Koji [5 ]
机构：
[1] Hefei Univ Technol, Inst Ind & Equipment Technol, Anhui Prov Key Lab Aerosp Struct Parts Forming Te, Hefei 230009, Peoples R China
[2] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Hefei 230026, Peoples R China
[3] CALTECH, Caltech Opt Imaging Lab, Andrew & Peggy Cherng Dept Med Engn, Pasadena, CA 91125 USA
[4] Anhui Univ, Sch Math Sci, Hefei 230601, Peoples R China
[5] RIKEN, Ctr Adv Photon, 2-1 Hirosawa, Wako, Saitama 3510198, Japan
来源：
OPTICS LETTERS | 2020年 / 45卷 / 14期
基金：
中国国家自然科学基金;
关键词：
FEATURES;
D O I：
10.1364/OL.397078
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and. high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond. laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications. (C) 2020 Optical Society of America
引用
收藏
页码：3925 / 3928
页数：4
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