Sputtered SnO2/ZnO Heterostructures for Improved NO2 Gas Sensing Properties

被引：40
|
作者：
Sharma, Bharat [1 ]
Sharma, Ashutosh [2 ,3 ]
Joshi, Monika [4 ]
Myung, Jae-ha [1 ]
机构：
[1] Incheon Natl Univ, Dept Mat Sci & Engn, Incheon 22012, South Korea
[2] Dept Mat Sci & Engn, 206 Worldcup Ro, Suwon 16499, Gyeonggi Do, South Korea
[3] Dept Energy Syst Res, 206 Worldcup Ro, Suwon 16499, Gyeonggi Do, South Korea
[4] Amity Univ, Amity Inst Nanotechnol, Noida 201313, Uttar Pradesh, India
来源：
CHEMOSENSORS | 2020年 / 8卷 / 03期
基金：
新加坡国家研究基金会;
关键词：
SnO2/ZnO; heterostructures; NO2; gas; MOS; sensing mechanism; SENSOR; NANOPARTICLES; NANOWIRES;
D O I：
10.3390/chemosensors8030067
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A highly sensitive and selective NO(2)gas sensor dependent on SnO2/ZnO heterostructures was fabricated using a sputtering process. The SnO2/ZnO heterostructure thin film samples were characterized by field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), Energy-dispersive X-ray spectroscopy (EDS), and X-ray photoelectron spectroscopy (XPS). Sensors fabricated with heterostructures attained higher gas response (S = 66.9) and quicker response-recovery (20 s, 45 s) characteristics at 100 degrees C operating temperature towards 100 ppm NO2 gas efficiently in comparison to sensors based on their mono-counterparts. The selectivity and stability of SnO2/ZnO heterostructures were studied. The more desirable sensing mechanism of SnO2/ZnO heterostructures towards NO2 was described in detail.
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页数：8
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