Model-blind characterization of thin-film optical constants with momentum-resolved reflectometry

被引:12
|
作者
DeCrescent, Ryan A. [1 ]
Brown, Steven J. [2 ]
Schlitz, Ruth A. [3 ]
Chabinyc, Michael L. [2 ]
Schuller, Jon A. [4 ]
机构
[1] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Mat Sci, Santa Barbara, CA 93106 USA
[3] SAGE Electrochr Inc, 2 Sage Way, Faribault, MN 55021 USA
[4] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
来源
OPTICS EXPRESS | 2016年 / 24卷 / 25期
基金
美国国家科学基金会;
关键词
SPECTROSCOPIC ELLIPSOMETRY; ANISOTROPY; THICKNESS; ORDER; POLY(3-ALKYLTHIOPHENE); PHTHALOCYANINE; ORIENTATION;
D O I
10.1364/OE.24.028842
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Determining optical constants of thin material films is important for characterizing their electronic excitations and for the design of optoelectronic devices. Spectroscopic ellipsometry techniques have emerged as the predominant approach for measuring thin-film optical constants. However, ellipsometry methods suffer from complications associated with highly model-dependent, multi-parameter spectral fitting procedures. Here, we present a model-blind, momentum-resolved reflectometry technique that yields accurate and precise optical constants, with quantifiable error estimates, even for film thicknesses less than 50 nm. These capabilities are demonstrated by interrogating an optical absorption resonance in films of the polymer P(NDI2OD-T2). We show that this approach produces exceptional agreement with UV-Vis-NIR absorption measurements, while simultaneously avoiding the need to construct complicated multi-oscillator spectral models. Finally, we use this procedure to resolve subtle differences in the out-of-plane optical properties of different film morphologies that were previously obscured in ellipsometry measurements. (C) 2016 Optical Society of America
引用
收藏
页码:28843 / 28858
页数:16
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