Aberration compensation in aplanatic solid immersion lens microscopy

被引：14
|
作者：
Lu, Yang [1 ]
Bifano, Thomas [2 ]
Uenlue, Selim [2 ]
Goldberg, Bennett [2 ]
机构：
[1] Boston Univ, Dept Mech Engn, Boston, MA 02215 USA
[2] Boston Univ, Photon Ctr, Boston, MA 02215 USA
来源：
OPTICS EXPRESS | 2013年 / 21卷 / 23期
关键词：
SUBSURFACE MICROSCOPY; ADAPTIVE OPTICS; SPHERICAL INTERFACE; DEFORMABLE MIRROR; RESOLUTION;
D O I：
10.1364/OE.21.028189
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA similar to 3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated. (C) 2013 Optical Society of America
引用
收藏
页码：28189 / 28197
页数：9
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