NANO-SCALE FORCES, STRESSES, AND TIP GEOMETRY EVOLUTION OF AMPLITUDE MODULATION ATOMIC FORCE MICROSCOPY PROBES

被引:0
|
作者
Vahdat, Vahid [1 ]
Grierson, David S.
Turner, Kevin T.
Carpick, Robert W. [1 ]
机构
[1] Univ Penn, Dept Mech Engn & Appl Mech, Philadelphia, PA 19104 USA
来源
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, VOL 7 | 2012年
关键词
NANOSCALE WEAR; ENERGY-DISSIPATION; SILICON; FRACTURE;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Atomic-scale wear is one of the main factors that hinders the performance of probes for atomic force microscopy (AFM) [1-6], including for the widely-used amplitude modulation (AM-AFM) mode. To conduct consistent and quantitative AM-AFM wear experiments, we have developed a protocol that involves controlling the tip-sample interaction regime, calculating the maximum contact force and normal stress over the course of the wear test, and quantifying the wear volume using high-resolution transmission electron microscopy imaging (HR-TEM). The tip-sample interaction forces are estimated from a closed-form equation that uses the Derjaguin-Muller-Toporov interaction model (DMT) accompanied by a tip radius measurement algorithm known as blind tip reconstruction. The applicability of this new protocol is demonstrated experimentally by scanning silicon probes against ultrananocrystalline diamond (UNCD) samples. The wear process for the Si tip involved blunting of the tip due to tip fragmentation and plastic deformation. In addition, previous studies on the relative contributions of energy dissipation processes to AFM tip wear are reviewed, and initial steps are taken towards applying this concept to AM-AFM.
引用
收藏
页码:543 / 549
页数:7
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