Fabrication of a 3D electrically small antenna using holographic photolithography

被引：25

作者：

Toriz-Garcia, J. J. ^{[1
]}

Cowling, J. J. ^{[2
]}

Williams, G. L. ^{[1
]}

Bai, Q. ^{[1
]}

Seed, N. L. ^{[1
]}

Tennant, A. ^{[1
]}

McWilliam, R. ^{[2
]}

Purvis, A. ^{[2
]}

Soulard, F. B. ^{[2
]}

Ivey, P. A. ^{[3
]}

机构：

[1] Univ Sheffield, Dept Elect & Elect Engn, Sheffield S1 3JD, S Yorkshire, England

[2] Univ Durham, Sch Engn, Durham DH1 3LE, England

[3] Peter Ivey Ltd, Calver S32 3YZ, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2013年 / 23卷 / 05期

基金：

英国工程与自然科学研究理事会;

关键词：

Fabrication;

D O I：

10.1088/0960-1317/23/5/055010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the novel fabrication of a 3D electrical small antenna and its subsequent characterization. The patterning of meander lines conformed onto a hemispherical substrate is achieved by 3D holographic photolithography, which uses time-division multiplexing of a series of iteratively optimized computer-generated holograms. The meander lines have a line width of 100 mu m and line separation of 400 mu m, with a line pitch of 500 mu m and a total meander length of 145 mm. The working frequency is found to be 2.06 GHz, with an efficiency of 46%. This work demonstrates a new method for the fabrication of 3D conformal antennas.

引用

页数：5

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