Research on the Resonant Frequency Formula of V-Shaped Cantilevers

被引：7
|
作者：
Yang, Kai [1 ]
Li, Zhigang [1 ]
Jing, Yupeng [1 ]
Chen, Dapeng [1 ]
Ye, Tianchun [1 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Lab Silicon Devices & Integrated Technol, Beijing 100864, Peoples R China
来源：
2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年
关键词：
cantilever; fundamental resonant frequency; triangular; V-shaped;
D O I：
10.1109/NEMS.2009.5068527
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.
引用
收藏
页码：59 / 62
页数：4
相关论文
共 50 条
  • [21] Nonlinear Dynamic Analysis of a 1:2 Internally Resonant V-shaped Harvester
    Danzi, Francesco
    Joodaky, Amin
    Gibert, James M.
    ACTIVE AND PASSIVE SMART STRUCTURES AND INTEGRATED SYSTEMS XIII, 2019, 10967
  • [22] Laser effects on the donor states in V-shaped and inverse V-shaped quantum wells
    Niculescu, E. C.
    Radu, A.
    Stafe, M.
    SUPERLATTICES AND MICROSTRUCTURES, 2009, 46 (03) : 443 - 450
  • [23] Noncoplanar V-shaped antenna
    Du, ZW
    Ruan, CL
    INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 1997, 18 (04): : 865 - 874
  • [24] Calculation of V-shaped overlaps
    Manukhin, Vadim A.
    MARINE INTELLECTUAL TECHNOLOGIES, 2021, (01): : 11 - 15
  • [25] STAPLING OR V-SHAPED OSTEOTOMY
    SCHER, MA
    SOUTH AFRICAN MEDICAL JOURNAL, 1984, 66 (06): : 206 - 206
  • [26] V-Shaped Multislit Weirs
    Ramamurthy, A. S.
    Kai, J.
    Han, S. S.
    JOURNAL OF IRRIGATION AND DRAINAGE ENGINEERING, 2013, 139 (07) : 582 - 585
  • [27] Noncoplanar v-shaped antenna
    Zhengwei Du
    Chengli Ruan
    International Journal of Infrared and Millimeter Waves, 1997, 18 : 865 - 874
  • [28] V-SHAPED PREDENS SPACE
    BOHRER, SP
    KLEIN, A
    MARTIN, W
    SKELETAL RADIOLOGY, 1985, 14 (02) : 111 - 116
  • [29] V-SHAPED RADIAL LENS
    BARANOVA, LA
    NARYLKOV, SG
    YAVOR, SY
    ZHURNAL TEKHNICHESKOI FIZIKI, 1984, 54 (11): : 2245 - 2248
  • [30] Noncoplanar V-shaped antenna
    Univ of Electronic Science and, Technology of China, Sichuan, China
    Int J Infrared Millim Waves, 4 (865-874):
12345