A high time-resolution two-tap CMOS lock-in pixel image sensor for time-resolved measurements and its applications

A CMOS lock-in pixel image sensor with embedded storage diodes in a pixel and lateral electric field modulator (LEFM) is developed for time-resolved measurements such as a fluorescence lifetime imaging microscopy (FLIM) and nearinfrared spectroscopy (NIRS). The time-resolved CMOS image sensor (CIS) with two-tap lock-in pixels achieves a very high time resolution of 10ps when images are averaged over 30 frames, a very short intrinsic response time of 180ps at 374nm, and a low temporal random noise of 1.75e-rms with true correlated double sampling (CDS) operation. In addition, by using the LEFM and optimized process, a very high extinction ratio of approximately 94% at 472nm laser diode is achieved. The usefulness of the proposed CIS is demonstrated by the device simulations and the measurements. Then, we confirmed that the developed imager is very suitable for the scientific applications such as a biomedical imaging and multifunctional cameras.