Microelectrode Array Fabrication by Micro-WEDM

被引:1
|
作者
Wang, Y. K. [1 ]
Wang, Z. L. [1 ]
Li, M. S. [1 ]
Zeng, W. L. [1 ]
Weng, M. H. [1 ]
机构
[1] Harbin Inst Technol, Sch Mech Engn, Harbin 150001, Peoples R China
来源
ULTRA-PRECISION MACHINING TECHNOLOGIES | 2009年 / 69-70卷
关键词
Micro-WEDM; Micro-EDM; Microelectrode array; Micro-hole array;
D O I
10.4028/www.scientific.net/AMR.69-70.79
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
In the paper, in order to overcome machining limits in throughput and precision because of positioning error and tool wear of a single tool electrode, a method for the microelectrode array fabrication by micro-WEDM is described and assessed. Characteristics of the microelectrode array fabrication by micro-WEDM, such as machining open voltage, pulse peak current, discharge duration and servo feed rate so on, are investigated through a series of experiments. A 10 X 10 squared electrode array is machined by micro-WEDM and the width of each squared electrode is about 40 mu m. The microelectrode array with good quality is obtained by applying decreased open voltage and peak current, increased discharge duration and optimized machining speed. Then micro hole-array is processed by applying obtained electrode array in micro-EDM method. The diameter of each squared hole in the array is about 50 mu m due to appropriate control strategy that per micro pulse energy is decreased and periodic jump-down is applied during the machining process. Experiments have demonstrated that the combination process of microelectrode array fabricated by micro-WEDM and micro-hole array done by micro-EDM is a novel method of process which makes it more feasible and efficient to fabricate microelectrode array and high-density hole-array.
引用
收藏
页码:79 / 82
页数:4
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