Picosecond ultrasonics:: An original tool for physical characterization of Bragg reflectors in bulk acoustic wave resonators

被引:0
|
作者
Emery, P [1 ]
Caruyer, G [1 ]
Vélard, R [1 ]
Casanova, N [1 ]
Ancey, P [1 ]
Devos, A [1 ]
机构
[1] STMicroelect, CMCC Crolles, Crolles, France
关键词
component; picosecond ultrasonics; Bragg reflector; thin film measurements; BAW;
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Here, we present the application of the picosecond ultrasonic technique to the design and the characterization of Bragg reflectors used in the insulation of bulk acoustic wave resonators. We first show that picosecond ultrasonics is helpful for the design of Bragg reflectors through precise sound velocity measurements in thin films whose elastic properties may be much different. Secondly we apply the same technique to the complete reflector and show that it permits to check the matching of the thicknesses with A and provides a direct measurement of the reflector's central frequency.
引用
收藏
页码:906 / 909
页数:4
相关论文
共 50 条
  • [31] PHONONIC BANDGAP COUPLED BULK ACOUSTIC WAVE RESONATORS
    Rottenberg, X.
    Jansen, R.
    Tilmans, H. A. C.
    2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [32] Spurious resonance free bulk acoustic wave resonators
    Kaitila, J
    Ylilammi, M
    Ellä, J
    Aigner, R
    2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 84 - 87
  • [33] Parametric excitation of bulk acoustic wave composite resonators
    Mansfeld, GD
    Polzikova, NI
    Prokhorova, IG
    2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2000, : 859 - 862
  • [34] SPURIOUS RESONANCES IN BULK ACOUSTIC-WAVE RESONATORS
    YOO, KB
    UBERALL, H
    WILLIAMS, W
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1983, 30 (03): : 188 - 188
  • [35] Atomic force microscopy characterization of electromechanical properties of RF acoustic bulk wave resonators
    San Paulo, A
    Liu, X
    Bokor, J
    MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 169 - 172
  • [36] RESONANT CONFINERS FOR ACOUSTIC LOSS MITIGATION IN BULK ACOUSTIC WAVE RESONATORS
    Segovia-Fernandez, Jeronimo
    Yen, Ernest T. -T.
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 165 - 168
  • [37] FABRICATION TOLERANCES OF SURFACE ACOUSTIC-WAVE RESONATORS, REFLECTORS, AND INTERDIGITAL TRANSDUCERS
    FIELD, ME
    CHEN, CL
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1977, 24 (02): : 144 - 144
  • [38] Switched Mode Thin Film Bulk Acoustic Wave Resonators
    Koohi, Milad Zolfagharloo
    Mortazawi, Amir
    2019 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2019, : 528 - 531
  • [39] A review of recent patents on bulk acoustic wave resonators and filters
    Menéndez, Óscar
    Verdú, Jordi
    Corrales, Edén
    de Paco, P.
    Recent Patents on Electrical Engineering, 2009, 2 (02) : 92 - 108
  • [40] PZT Thin Film Bulk Acoustic Wave Resonators and filters
    Kirby, PB
    Su, QX
    Komuro, E
    Zhang, Q
    Imura, M
    Whatmore, RW
    PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2001, : 687 - 694