MEMS SENSORS FOR ROBOTS

被引：0
|
作者：
Shimoyama, Isao [1 ]
机构：
[1] Univ Tokyo, Tokyo, Japan
来源：
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2019年
关键词：
D O I：
10.1109/memsys.2019.8870756
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：120 / 120
页数：1
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