Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode

被引：30

作者：

Akhmadeev, Yu. H. ^{[1
]}

Denisov, V. V. ^{[1
]}

Koval, N. N. ^{[1
]}

Kovalsky, S. S. ^{[1
]}

Lopatin, I. V. ^{[1
]}

Schanin, P. M. ^{[1
]}

Yakovlev, V. V. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia

来源：

PLASMA PHYSICS REPORTS | 2017年 / 43卷 / 01期

基金：

俄罗斯科学基金会;

关键词：

D O I：

10.1134/S1063780X17010020

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of >= 2 m(2) at gas pressures of 0.4-1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 mu s, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 10(12) cm(-3) and an electron temperature of 1 eV in a volume of > 0.2 m(3) was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm(2).

引用

页码：67 / 74

页数：8

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