Fabrication of polymer microlens array with controllable focal length by modifying surface wettability

被引:34
|
作者
Xu, Qiao [1 ]
Dai, Bo [1 ]
Huang, Yu [1 ]
Wang, Huansi [1 ]
Yang, Zhuoqing [2 ]
Wang, Kaimin [1 ]
Zhuang, Songlin [1 ]
Zhang, Dawei [1 ]
机构
[1] Univ Shanghai Sci & Technol, Engn Res Ctr Opt Instrument & Syst, Shanghai Key Lab Modern Opt Syst, Minist Educ, Shanghai 200093, Peoples R China
[2] SJTU, Sch Elect Informat & Elect Engn, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
来源
OPTICS EXPRESS | 2018年 / 26卷 / 04期
基金
中国国家自然科学基金;
关键词
HIGH NUMERICAL APERTURE; CONTROLLED CURVATURE; CONTACT-ANGLE; LINE TENSION; LENS ARRAYS; DROP SIZE; LASER; LITHOGRAPHY; MICROHOLES; PDMS;
D O I
10.1364/OE.26.004172
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A straightforward technique for fabricating low-cost microlens arrays with controllable focal length is developed. By harnessing and manipulating the interfacial energy between the liquid-state acrylate resin and the solidified polydimethylsiloxane (PDMS), the surface of the acrylate resin in the PDMS microhole presents a spherical shape and the curvature can be flexibly controlled. With the change of the processing time for the surface modification of the PDMS microholes, the focal length of the concave microlenses varies from -296.3 mu m to -67.4 mu m. The numerical aperture of 0.45 is realized. The focal length and the aperture of the microlenses are also affected by the diameter of the microholes. The fabricated concave microlens array can be employed as a master to further duplicate convex microlens array. A good image quality can be achieved by using the convex microlens arrays. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:4172 / 4182
页数:11
相关论文
共 50 条
  • [41] Focal length measurement of microlens array for Shack-Hartmann wavefront sensor using interferometer
    Kumar, M. Senthil
    Narayanamurthy, C. S.
    Kumar, A. S. Kiran
    OPTICAL ENGINEERING, 2013, 52 (12)
  • [42] In-situ fabrication of an out-of-plane microlens with pre-definable focal length
    Shao, Guocheng
    Cai, Ziliang
    Miao, Zhengyu
    Wang, Wanjun
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (11): : 1823 - 1828
  • [43] In-situ fabrication of an out-of-plane microlens with pre-definable focal length
    Guocheng Shao
    Ziliang Cai
    Zhengyu Miao
    Wanjun Wang
    Microsystem Technologies, 2013, 19 : 1823 - 1828
  • [44] Fabrication of controllable wettability of crystalline silicon surfaces by laser surface texturing and silanization
    Yang, Chengjuan
    Jing, Xiubing
    Wang, Fujun
    Ehmann, Kornel F.
    Tian, Yanling
    Pu, Zihao
    APPLIED SURFACE SCIENCE, 2019, 497
  • [45] Design and fabrication of a micro Alvarez lens array with a variable focal length
    Huang, Chunning
    Li, Lei
    Yi, Allen Y.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (04): : 559 - 563
  • [46] Design and fabrication of a micro Alvarez lens array with a variable focal length
    Chunning Huang
    Lei Li
    Allen Y. Yi
    Microsystem Technologies, 2009, 15 : 559 - 563
  • [47] Rapid fabrication of mini droplet lens array with tunable focal length
    戴博
    王奂思
    徐巧
    李振庆
    陶春先
    张大伟
    Chinese Optics Letters, 2018, 16 (12) : 74 - 77
  • [48] Rapid fabrication of mini droplet lens array with tunable focal length
    Dai, Bo
    Wang, Huansi
    Xu, Qiao
    Li, Zhenqing
    Tao, Chunxian
    Zhang, Dawei
    CHINESE OPTICS LETTERS, 2018, 16 (12)
  • [49] Fabrication of microlens array on silicon surface using electrochemical wet stamping technique
    Lai, Lei-Jie
    Zhou, Hang
    Zhu, Li-Min
    APPLIED SURFACE SCIENCE, 2016, 364 : 442 - 445
  • [50] Polarization-dependent optical tuning of focal intensity of liquid crystal polymer microlens array
    S.-Y. Huang
    T.-C. Tung
    C.-L. Ting
    H.-C. Jau
    M.-S. Li
    H.-K. Hsu
    A. Y.-G. Fuh
    Applied Physics B, 2011, 104 : 93 - 97