Fabrication of polymer microlens array with controllable focal length by modifying surface wettability

被引:34
|
作者
Xu, Qiao [1 ]
Dai, Bo [1 ]
Huang, Yu [1 ]
Wang, Huansi [1 ]
Yang, Zhuoqing [2 ]
Wang, Kaimin [1 ]
Zhuang, Songlin [1 ]
Zhang, Dawei [1 ]
机构
[1] Univ Shanghai Sci & Technol, Engn Res Ctr Opt Instrument & Syst, Shanghai Key Lab Modern Opt Syst, Minist Educ, Shanghai 200093, Peoples R China
[2] SJTU, Sch Elect Informat & Elect Engn, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
来源
OPTICS EXPRESS | 2018年 / 26卷 / 04期
基金
中国国家自然科学基金;
关键词
HIGH NUMERICAL APERTURE; CONTROLLED CURVATURE; CONTACT-ANGLE; LINE TENSION; LENS ARRAYS; DROP SIZE; LASER; LITHOGRAPHY; MICROHOLES; PDMS;
D O I
10.1364/OE.26.004172
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A straightforward technique for fabricating low-cost microlens arrays with controllable focal length is developed. By harnessing and manipulating the interfacial energy between the liquid-state acrylate resin and the solidified polydimethylsiloxane (PDMS), the surface of the acrylate resin in the PDMS microhole presents a spherical shape and the curvature can be flexibly controlled. With the change of the processing time for the surface modification of the PDMS microholes, the focal length of the concave microlenses varies from -296.3 mu m to -67.4 mu m. The numerical aperture of 0.45 is realized. The focal length and the aperture of the microlenses are also affected by the diameter of the microholes. The fabricated concave microlens array can be employed as a master to further duplicate convex microlens array. A good image quality can be achieved by using the convex microlens arrays. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:4172 / 4182
页数:11
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