Electrically driven nanopillars for THz quantum cascade lasers

被引：13

作者：

Amanti, M. I. ^{[1
,2
]}

Bismuto, A. ^{[1
]}

Beck, M. ^{[1
]}

Isa, L. ^{[3
]}

Kumar, K. ^{[3
,4
]}

Reimhult, E. ^{[3
,5
]}

Faist, J. ^{[1
]}

机构：

[1] ETH, Inst Quantum Elect, CH-8093 Zurich, Switzerland

[2] Univ Paris 07, Lab Mat & Phenomenes Quant, F-75205 Paris, France

[3] ETH, Lab Surface Sci & Technol, CH-8093 Zurich, Switzerland

[4] ASTAR, IMRE, Singapore 3, Research Link, Singapore

[5] Univ Nat Resources & Life Sci BOKU Vienna, Dept NanoBiotechnol, A-1190 Vienna, Austria

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 09期

关键词：

LITHOGRAPHY; FABRICATION; THRESHOLD;

D O I：

10.1364/OE.21.010917

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this work we present a rapid and parallel process for the fabrication of large scale arrays of electrically driven nanopillars for THz quantum cascade active media. We demonstrate electrical injection of pillars of 200 nm diameter and 2 mu m height, over a surface of 1 mm(2). THz electroluminescence from the nanopillars is reported. This result is a promising step toward the realization of zero-dimensional structure for terahertz quantum cascade lasers. (C) 2013 Optical Society of America

引用

页码：10917 / 10923

页数：7

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