Electrode-Gap Effects on the Electron Density and Electron Temperature in Atmospheric Radio-Frequency Discharges

被引:17
|
作者
Zhang, Yuantao T. [1 ]
Lou, Jie [1 ]
Li, Qingquan [1 ]
Li, Qingmin [1 ]
机构
[1] Shandong Univ, Sch Elect Engn, Shandong Prov Key Lab UHV Technol & Gas Discharge, Jinan 250061, Peoples R China
关键词
Atmospheric radio-frequency (rf) discharges; electron density; electron temperature; plasma simulation;
D O I
10.1109/TPS.2013.2244912
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The electrode-gap effects on discharge characteristics have attracted increasing attention in the design of atmospheric discharge devices. In this paper, a 1-D fluid model is used to explore the influences of electrode gap on the electron density and temperature of atmospheric radio-frequency discharges under a constant power density condition. As the electrode gap is increased, both the applied voltage and current density increase and the computational data and analytical equations show a monotonic increase in the electron density; the peak electron temperature in the sheath increases but decreases in the bulk plasma region. At a constant power density, altering the electrode gap can be used to tailor the spatial distribution of the electron density and electrode temperature.
引用
收藏
页码:414 / 420
页数:7
相关论文
共 50 条
  • [21] Mode characteristics of radio-frequency atmospheric glow discharges
    Shi, JJ
    Kong, MG
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 624 - 630
  • [22] Existence of solutions for electron balance problem in the stationary radio-frequency induction discharges
    Zheltukhin, V. S.
    Solovyev, S. I.
    Solovyev, P. S.
    Chebakova, V. Yu
    11TH INTERNATIONAL CONFERENCE ON MESH METHODS FOR BOUNDRY-VALUE PROBLEMS AND APPLICATIONS, 2016, 158
  • [23] Genetic effects of radio-frequency, atmospheric-pressure glow discharges with helium
    Li, Guo
    Li, He-Ping
    Wang, Li-Yan
    Wang, Sen
    Zhao, Hong-Xin
    Sun, Wen-Ting
    Xing, Xin-Hui
    Bao, Cheng-Yu
    APPLIED PHYSICS LETTERS, 2008, 92 (22)
  • [24] Electron dissipation after radio-frequency discharge burst at atmospheric pressure
    Han, Qianhan
    Guo, Ying
    Zhang, Yarong
    Zhang, Jing
    Shi, J. J.
    AIP ADVANCES, 2021, 11 (02)
  • [25] RADIO-FREQUENCY HEATING EFFECTS ON ELECTRON-DENSITY IN LOWER E-REGION
    WILLIS, JW
    DAVIS, JR
    JOURNAL OF GEOPHYSICAL RESEARCH, 1973, 78 (25): : 5710 - 5717
  • [26] On the electron density of atmospheric pressure radio frequency dielectric barrier discharge and discharge with bare electrode
    Wang, Lei
    Cvetanovic, Nikola
    Obradovic, Bratislav
    Ionita, Eusebiu-Rosini
    Dinescu, Gheorghe
    Leys, Christophe
    Nikiforov, Anton
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59
  • [27] Model of a radio-frequency low electron temperature plasma source
    Rauf, Shahid
    Dorf, Leonid
    Collins, Kenneth
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 27 (07):
  • [28] LANGMUIR PROBE MEASUREMENTS OF ELECTRON-TEMPERATURE AND DENSITY SCALING IN MULTIDIPOLE RADIO-FREQUENCY PLASMAS
    LAI, C
    BREUN, RA
    SANDSTROM, PW
    WENDT, AE
    HERSHKOWITZ, N
    WOODS, RC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1199 - 1205
  • [29] Effects of electron inertia in capacitively coupled radio frequency discharges
    Xiang, N
    PHYSICS OF PLASMAS, 2004, 11 (09) : 4213 - 4219
  • [30] Experimental study on the impedance of atmospheric radio-frequency glow discharges
    Li, H. (liheping@tsinghua.edu.cn), 2013, Science Press (39):