Advances in high-pulse energy excimer laser and applications

被引：0
|
作者：
Chang, Andrew [1 ]
Paetzel, Rainer [2 ]
Herbst, Ludolf [2 ]
Fechner, Burkhard [2 ]
机构：
[1] Coherent Inc, 5100 Patrick Henry Dr, Santa Clara, CA 95054 USA
[2] Coherent GmbH, D-37079 Gottingen, Germany
来源：
2007 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1-4 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as Pulsed Laser Deposition in thin-film manufacturing, UPS annealing in FPD, surface hardening in Automotive, and direct patterning in Advanced Packaging markets.
引用
收藏
页码：724 / +
页数：2
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