Advances in high-pulse energy excimer laser and applications

被引：0
|
作者：
Chang, Andrew [1 ]
Paetzel, Rainer [2 ]
Herbst, Ludolf [2 ]
Fechner, Burkhard [2 ]
机构：
[1] Coherent Inc, 5100 Patrick Henry Dr, Santa Clara, CA 95054 USA
[2] Coherent GmbH, D-37079 Gottingen, Germany
来源：
2007 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1-4 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as Pulsed Laser Deposition in thin-film manufacturing, UPS annealing in FPD, surface hardening in Automotive, and direct patterning in Advanced Packaging markets.
引用
收藏
页码：724 / +
页数：2
相关论文
共 50 条
  • [1] EXCIMER LASER WITH HIGH PULSE ENERGY AND TYPICAL APPLICATIONS
    JETTER, HL
    SCHMATJKO, KJ
    SCHROEDER, M
    HIGH POWER LASERS AND LASER MACHINING TECHNOLOGY, 1989, 1132 : 92 - 101
  • [2] SPECTRAL BEHAVIOR OF RUBY HIGH-PULSE LASER
    LUTHY, W
    KELLER, M
    WEBER, H
    ZEITSCHRIFT FUR ANGEWANDTE MATHEMATIK UND PHYSIK, 1971, 22 (04): : 776 - &
  • [3] High-pulse repetition frequency ultrashort pulse laser processing of copper
    Schille, Joerg
    Schneider, Lutz
    Lickschat, Peter
    Loeschner, Udo
    Ebert, Robby
    Exner, Horst
    JOURNAL OF LASER APPLICATIONS, 2015, 27
  • [4] High energy per pulse excimer laser for Silicon annealing
    Godard, B
    Zahorski, D
    HIGH-POWER LASER ABLATION, PTS 1-2, 1998, 3343 : 653 - 660
  • [5] Pulse stretcher with variable pulse length for excimer laser applications
    Burkert, A.
    Bergmann, J.
    Triebel, W.
    Natura, U.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (03):
  • [6] Development of high-pulse energy Ho:Tm:YLF coherent transmitters
    Singh, UN
    LASER RADAR TECHNOLOGY AND APPLICATIONS III, 1998, 3380 : 70 - 74
  • [7] High-pulse energy MOPA using all-fiber components
    Headley, C
    Yablon, AD
    Andrejeo, MJ
    Mermelstein, MD
    Brar, K
    Fishteyn, M
    Jasapara, J
    DiGiovanni, DJ
    Fiber Lasers II: Technology, Systems, and Applications, 2005, 5709 : 343 - 353
  • [8] High-pulse series converters for HVDC systems
    Villablanca, M
    Arias, M
    Acevedo, C
    IEEE TRANSACTIONS ON POWER DELIVERY, 2001, 16 (04) : 766 - 774
  • [9] CO2-based hollow-core fiber Raman laser with high-pulse energy at 1.95 μm
    Wang, Yazhou
    Schiess, Olav Thorbjorn Sandberg
    Amezcua-Correa, Rodrigo
    Markos, Christos
    OPTICS LETTERS, 2021, 46 (20) : 5133 - 5136
  • [10] Flywheels show promise for 'high-pulse' satellites
    Proctor, P
    AVIATION WEEK & SPACE TECHNOLOGY, 1999, 150 (04): : 67 - 67
12345