Correlation between Carbon Incorporation and Defect Formation in Quasi-Single Crystalline Silicon

被引:0
|
作者
Tsuchiya, Yuki [1 ]
Kusunoki, Hiroki [1 ]
Miyazaki, Naoto [1 ]
Sameshima, Takashi [1 ]
Tachibana, Tomihisa [1 ]
Kojima, Takuto [3 ]
Arafune, Koji [4 ]
Ohshita, Yoshio [3 ]
Ono, Haruhiko [2 ]
Ogura, Atsushi [1 ]
机构
[1] Meiji Univ, Kawasaki, Kanagawa 2148571, Japan
[2] Kanagawa Ind Technol Ctr, Ebina, Kanagawa 2430435, Japan
[3] Toyota Technol Inst, Nagoya, Aichi 4688511, Japan
[4] Univ Hyogo, Himeji, Hyogo 6712280, Japan
来源
2012 38TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC) | 2012年
关键词
carbon incorporation; defect formation; precipitate; small-angle grain boundary; solar cell; quasi-single crystalline silicon;
D O I
暂无
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We investigated the correlation between C incorporation and defect generation in quasi-single crystalline silicon ingots. The substitutional carbon concentration and etch pit density in the ingot fabricated with atmosphere control to suppress C incorporation were much lower than those in the ingot fabricated without controll. In addition, the precipitates consisted of C, N and Si were confirmed in the ingot fabricated without control. After the precipitation, small-angle grain boundaries (SA-GBs) were generated. We consider that the precipitation were the origin of SA-GBs, therefore the crystalline defect density can be decreased by reducing the incorporation of C impurities during crystal growth.
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页数:5
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