A novel planar magnetic sensor based on orthogonal fluxgate principle

被引：0
|
作者：
Zorlu, O [1 ]
Kejik, P [1 ]
Vincent, F [1 ]
Popovic, RS [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Microsyst, CH-1015 Lausanne, Switzerland
来源：
2005 PhD Research in Microelectronics and Electronics, Vols 1 and 2, Proceedings | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core covering an excitation rod, and planar coils for signal detection. The fabricated sensor has a linear range of +/- 250 mu T, a sensitivity of 4.3 mV/mT, and a perming below 400 nT for 200 mA peak sinusoidal excitation current at 100 kHz. The effect of demagnetization on the sensitivity, linear range, and penning for this structure is demonstrated by varying the length of the ferromagnetic core.
引用
收藏
页码：215 / 218
页数：4
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