Numerical simulations of transport processes during Czochralski growth of semiconductor compounds

被引:5
|
作者
Xiao, Q
机构
[1] Innovative Research Inc., Minneapolis, MN 55413, 2520 Broadway St., NE
关键词
flow; heat transfer; segregation; Czochralski growth; semiconductor; GUI;
D O I
10.1016/S0022-0248(96)01054-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Several important transport processes during Czochralski growth of semiconductor compounds, such as solute-concentration-driven flow, heat transfer, and solute segregation are numerically simulated using a finite-volume methodology. Our results show strong effects of flow patterns and heal transfer on solute distribution. The effects of crystal rotation are also studied numerically. All the calculations are conducted on personal computers (Pentium) with a user-friendly Graphics User Interface, and each solution takes less than 10 min: indicating that our methodology is of great usefulness as a cost-effective, easy-to-use design tool for crystal growers.
引用
收藏
页码:7 / 12
页数:6
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