Development of the Miniature Hemispherical Tilt Stage Driven by Stick-slip Motion using Piezoelectric Actuators

被引：0
|
作者：
Shiratori, Hiroaki [1 ]
Takizawa, Masato [1 ]
Irie, Yuuka [1 ]
Hirata, Shinnosuke [1 ]
Aoyama, Hisayuki [1 ]
机构：
[1] Univ Electrocommun, Dept Mech Engn & Intelligent Syst, Chofu, Tokyo 182, Japan
来源：
MECATRONICS REM 2012 | 2012年
关键词：
microscope stage; piezoelectric element; stick-slip motion;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Miniature hemispherical stage has been proposed for improvement of microscopic observation and manipulation. The stage can be rotated in arbitrary direction under a scanning electron microscope. The stage is composed of a hemisphere and three drive units. Besides, the drive unit is composed of a drive ball and two piezoelectric actuators. The drive ball is moved by two piezoelectric actuators, which are orthogonally arranged, in a plane. The movable plane of each drive ball is same as the tangent plane between the hemisphere and each drive ball. The hemisphere on three drive balls is rotated in arbitrary direction by stick-slip motion of each drive ball. The rotational direction of the stage can be controlled by the movable directions of each drive ball. In this paper, the design and fabrication of the small hemispherical stage are described. The rotational directions of the stage are evaluated using a laser autocollimator.
引用
收藏
页码：251 / 257
页数：7
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