Calibration methodologies for scanning thermal microscopy

被引:0
|
作者
Guen, Eloise [1 ]
Renahy, David [1 ]
Massoud, Mouhannad [1 ,2 ]
Bluet, Jean-Marie [2 ]
Chapuis, Pierre-Olivier [1 ]
Gomes, Severine [1 ]
机构
[1] Univ Claude Bernard Lyon 1, CNRS, INSA Lyon, CETHIL UMR5008, F-69621 Villeurbanne, France
[2] Univ Claude Bernard Lyon 1, CNRS, Inst Nanotechnol Lyon, F-69621 Villeurbanne, France
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O414.1 [热力学];
学科分类号
摘要
This work analyses the heat transfer between various scanning thermal microscopy (SThM) probes and samples. In order to perform quantitative measurements with SThM techniques, we have developed well-established and reproducible calibration methodologies. We present here two approaches of the SThM measurement: one to measure thermal conductivity of solid materials with a Wollaston SThM microprobe and a second one to evaluate phase transition temperatures of polymeric materials with a silicon low-doped nanoprobe. Based on the comparison of experimental data and modeling results, we have estimated the local resolution of the microprobe to be associated to a radius of 300 nm. Concerning the nanoprobe, we have demonstrated the strong dependence of measurement on sample topography and roughness.
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页码:110 / 114
页数:5
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