Analysis of cross talk in high density mesa linear InGaAs detector arrays using tiny light dot

被引:0
|
作者
Zhu, Yaoming [1 ]
Li, Xue [1 ]
Wei, Jun [1 ]
Li, Jianwei [1 ]
Tang, HengJing [1 ]
Gong, Haimei [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Labs Transducer Technol, Shanghai 200083, Peoples R China
关键词
Linear InGaAs detectors array; cross talk; modulation transfer function; light dot;
D O I
10.1117/12.975736
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
With the development of material growth and device technologies, the pixel density becomes much higher. The pixel size and the spacing between pixels have been becoming smaller and smaller, causing the cross talk of the neighboring pixels acuter. Linear InGaAs detector arrays with 25 mu m pitch and 2 mu m spacing were fabricated, and the modulation transfer function of detector arrays with infrared lens was measured using a system of collimator tube. A tiny light dot produced by the collimator tube was used to analyze and calculated the cross talk of the detector with conserved absorber around the photosensitive mesa, and the cross talk between two neighboring pixels was approximately estimated. With the conserved absorber structure, the electronic cross talk is dominant in the cross talks between neighboring pixels.
引用
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页数:5
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