Multichannel bandpass filters utilizing multilayer photonic crystal

被引：5
|
作者：
Ohtera, Yasuo [1 ]
Yamada, Hirohito [1 ]
机构：
[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan
来源：
OPTICS LETTERS | 2013年 / 38卷 / 08期
关键词：
ELEMENTS;
D O I：
10.1364/OL.38.001235
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO2 multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50 similar to 175 nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified. (C) 2013 Optical Society of America
引用
收藏
页码：1235 / 1237
页数：3
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