Direct measurement of transfer functions in Kelvin probe force microscopy using artificially patterned surface potentials

被引:4
|
作者
Ozasa, Kazunari [1 ]
Nemoto, Shigeyuki [1 ]
Isoshima, Takashi [1 ]
Ito, Eisuke [1 ]
Maeda, Mizuo [1 ]
Hara, Masahiko [1 ]
机构
[1] RIKEN, Wako, Saitama 3510198, Japan
关键词
surface potential; Kelvin probe force microscope (KFM); tris(8-hydroxyquinolinato)aluminum(III) (Alq(3)); point spread function; transfer function;
D O I
10.1143/JJAP.47.5630
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a direct measurement of two-dimensional (2D) transfer functions of conductive probes used in Kelvin probe force microscopy (KFM). The 2D transfer function, are obtained by measuring a well-defined step pattern Of surface potentials, prepared oil thin films of tris(8-hydroxyquinolinato)aluminum(III) (Alq(3)) by contact-mask exposure. The experimentally obtained 2D transfer functions are highly asymmetric and are spread over 50 mu m. A new finding is the observation of negative values in the KFM transfer function. which cannot be explained by conventional KFM formula. The reconstruction of true surface-potential profiles by model-fitting calculation is demonstrated. The technique presented in this study. i.e. the preparation of surface-potential patterns oil Alq(3) thin films, is ideal for determining the KFM transfer functions experimentally.
引用
收藏
页码:5630 / 5635
页数:6
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