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State Key Laboratory of Material Modification by Laser,Electron and Ion Beams,Department of Physics and College of Advanced Science and Technology,Dalian University of Technology,Dalian ,China College of Physics Science and Technology,Dalian University,Dal State Key Laboratory of Material Modification by Laser,Electron and Ion Beams,Department of Physics and College of Advanced Science and Technology,Dalian University of Technology,Dalian ,China College of Physics Science and Technology,Dalian University,Dal