Thickness-dependent (001) orientation and surface morphology of rapid-annealed FePt thin films on a glass substrate

被引:3
|
作者
Liu, S. H. [1 ]
Chou, C. L. [1 ]
Hsiao, S. N. [1 ]
Chen, S. K. [1 ]
Lee, H. Y. [2 ,3 ]
机构
[1] Feng Chia Univ, Mat Sci & Engn, Taichung 407, Taiwan
[2] Natl Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan
[3] Natl Hsinchu Univ Educ, Dept Appl Sci, Hsinchu 300, Taiwan
关键词
Magnetic materials; Thin films; Residual stresses; Magnetic anisotropy; Crystallographic anisotropy; FePt thin film; Intrinsic film stress; Surface morphology; (001) orientation; MAGNETIC-ANISOTROPY; UNDERLAYER; GROWTH;
D O I
10.1016/j.vacuum.2015.04.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thickness-dependent (001) orientation and surface morphology of rapid-annealed FePt thin films were investigated. For the rapid annealed FePt films with different thicknesses (5-60 nm), the ordering parameters were obtained to be higher than 0.9. As film thickness (t) was increased from 5 to 20 nm, the Lotgering orientation factor (LOF) increased from 0.75 to 0.99 (nearly perfect 001 texture), and then decreased to 0.85 for films with t = 60 nm. Surface morphology observation indicates an evolution from a continuous to island-like structure with decreasing t. Due to high temperature annealing, the surface atomic diffusion and substrate-film interfacial diffusion results in the de-wetting of film structure, when t is thin. This morphological change leads to the stress-relaxation of the preformed tensile stress induced by the impingement of grain growth, which further causes a decrease of LOF. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:305 / 309
页数:5
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