BiMnO3 (BMO) and Ca (10 at%) substituted BiMnO3 (BCMO) thin films are grown on n-type Si (100) and Pt/Ti/SiO2/Si (100) substrates by RF magnetron sputtering. The structural, elemental, morphological, magnetic, dielectric and ferroelectric properties of the films are investigated by X-ray diffraction (XRD), energy-dispersive X-ray analysis (EDAX), atomic force microscope (AFM), vibrating sample magnetometer (VSM), dielectric and ferroelectric measurements, respectively. The XRD pattern shows that the films acquire monoclinic structure with C2 space group. The elemental composition and surface roughness of the films are also measured by EDAX and AFM analysis, respectively. The VSM results exhibit that all the films possess room temperature ferromagnetism and the BCMO film deposited on the Si substrate has better magnetic properties (M (rem) = 1.8 x 10(-3) emu cm(-3)) than the other films. The dielectric measurement also reveals that the BCMO film has the highest value of dielectric constant (497) with less dielectric loss (0.3). Similarly, the ferroelectric measurement implies that all the films possess room temperature ferroelectricity.