A PIEZOELECTRIC RESONANT HUMIDITY SENSOR WITH ENHANCED SENSITIVITY BASED ON HIGH MODE DRIVEN BY INTERDIGITAL TRANSDUCERS COATED WITH UNIFORM GRAPHENE OXIDE FILM

被引：0
|
作者：
Pang, Jintao [1 ]
Le, Xianhao [1 ]
Xie, Jin [1 ]
机构：
[1] Zhejiang Univ, State Key Lab Fluid Power & Mechatron Syst, Hangzhou, Zhejiang, Peoples R China
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
中国国家自然科学基金;
关键词：
Humidity sensor; piezoelectric resonator; high mode; graphene oxide; high relative sensitivity;
D O I：
10.1109/transducers.2019.8808770
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a high-performance humidity sensor using high mode of piezoelectric resonator driven by interdigital transducers (IDT) with a thin graphene oxide (GO) film. Innovative claims include: (1) the higher relative sensitivity using high mode driven by IDT compared with normal configuration. (2) monitoring of humidity variation with short response/recovery time. The results demonstrate an improved sensitivity (668 ppm) at 10%-90% relative humidity, higher than that (436 ppm) of normal configuration with resonant frequency of 70 MHz. The sensor also shows short response (similar to 7 s)/recovery (similar to 13 s) time,
引用
收藏
页码：1957 / 1960
页数：4
相关论文
共 50 条
  • [21] Humidity sensor based on a graphene oxide-coated few-mode fiber Mach-Zehnder interferometer
    Fan, X.
    Wang, Q.
    Zhou, M.
    Liu, F.
    Shen, H.
    Wei, Z.
    Wang, F.
    Tan, C.
    Meng, H.
    OPTICS EXPRESS, 2020, 28 (17): : 24682 - 24692
  • [22] Fiber optic humidity sensor based on the graphene oxide/PVA composite film
    Wang, Youqing
    Shen, Changyu
    Lou, Weimin
    Shentu, Fengying
    OPTICS COMMUNICATIONS, 2016, 372 : 229 - 234
  • [23] Humidity Sensor Based on Lamb Wave Resonator with Different Graphene Oxide Film
    Pang, Jintao
    Le, Xianhao
    Huang, Wei
    Xie, Jin
    2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018), 2018, : 280 - 283
  • [24] HUMIDITY SENSOR BASED ON CORE-OFFSET FIBER MACH-ZEHNDER INTERFEROMETER COATED GRAPHENE OXIDE FILM
    Liu, Shuai
    Meng, Hongyun
    Xiong, Rui
    Deng, Shuying
    Wang, Xianjun
    Jiao, Tao
    Tan, Chunhua
    Huang, Xuguang
    2017 16TH INTERNATIONAL CONFERENCE ON OPTICAL COMMUNICATIONS & NETWORKS (ICOCN 2017), 2017,
  • [25] Relative humidity sensor of S fiber taper based on graphene oxide film
    Zhao, Yang
    Li, Ai-Wu
    Guo, Qi
    Ming, Xin-Yu
    Zhu, Yong-Qin
    Sun, Xiang-Chao
    Li, Pu
    Yu, Yong-Sen
    OPTICS COMMUNICATIONS, 2019, 450 : 147 - 154
  • [26] High-sensitivity and low-hysteresis humidity sensor based on reduced graphene oxide/zinc oxide nanocomposites
    Safi, Muhammad Asim
    Shah, Mutabar
    Iftikhar, Muhammad
    Tajik, Haseeb Ahmed
    Jan, Ahmad
    Shah, Kamal A.
    ul Haq, Izaz
    Rahim, Shoaib
    EMERGENT MATERIALS, 2024,
  • [27] Fiber temperature and humidity sensor based on photonic crystal fiber coated with graphene oxide
    Li J.-X.
    Tong Z.-R.
    Jing L.
    Zhang W.-H.
    Qin J.
    Liu J.-W.
    Optics Communications, 2021, 467
  • [28] Fiber temperature and humidity sensor based on photonic crystal fiber coated with graphene oxide
    Li Jia-xin
    Tong Zheng-rong
    Jing Lei
    Zhang Wei-hua
    Qin Juan
    Liu Jing-wei
    OPTICS COMMUNICATIONS, 2020, 467
  • [29] Graphene oxide coated long period grating based fibre optic humidity sensor
    Dissanayake, Kasun P. W.
    Wu, Weiping
    Nguyen, Hien
    Sun, Tong
    Grattan, Kenneth T. V.
    2017 25TH INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS (OFS), 2017, 10323
  • [30] High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers
    Kumar, AKS
    Paruch, P
    Triscone, JM
    Daniau, W
    Ballandras, S
    Pellegrino, L
    Marré, D
    Tybell, T
    APPLIED PHYSICS LETTERS, 2004, 85 (10) : 1757 - 1759
12345