A PIEZOELECTRIC RESONANT HUMIDITY SENSOR WITH ENHANCED SENSITIVITY BASED ON HIGH MODE DRIVEN BY INTERDIGITAL TRANSDUCERS COATED WITH UNIFORM GRAPHENE OXIDE FILM

被引：0

作者：

Pang, Jintao ^{[1
]}

Le, Xianhao ^{[1
]}

Xie, Jin ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Fluid Power & Mechatron Syst, Hangzhou, Zhejiang, Peoples R China

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

基金：

中国国家自然科学基金;

关键词：

Humidity sensor; piezoelectric resonator; high mode; graphene oxide; high relative sensitivity;

D O I：

10.1109/transducers.2019.8808770

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a high-performance humidity sensor using high mode of piezoelectric resonator driven by interdigital transducers (IDT) with a thin graphene oxide (GO) film. Innovative claims include: (1) the higher relative sensitivity using high mode driven by IDT compared with normal configuration. (2) monitoring of humidity variation with short response/recovery time. The results demonstrate an improved sensitivity (668 ppm) at 10%-90% relative humidity, higher than that (436 ppm) of normal configuration with resonant frequency of 70 MHz. The sensor also shows short response (similar to 7 s)/recovery (similar to 13 s) time,

引用

页码：1957 / 1960

页数：4

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