Molecular patterning using two-dimensional polymer Langmuir-Blodgett films

被引：13
|
作者：
Aoki, A [1 ]
Miyashita, T [1 ]
机构：
[1] TOHOKU UNIV,INST CHEM REACT SCI,AOBA KU,SENDAI,MIYAGI 98077,JAPAN
来源：
ADVANCED MATERIALS | 1997年 / 9卷 / 04期
关键词：
D O I：
10.1002/adma.19970090417
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Research News: Langmuir-Blodgett (LB) films for high-resolution resists for the preparation of integrated circuits with higher densities are reviewed briefly A technique based on the polymerization of monomeric LB films and a newer one based on the two-dimensional cross-linking of a polymeric LB film are described. It is demonstrated that cross-linkable polymeric LB films have the ability to create high-resolution molecular patterning with nanometer (layer) thickness. Examples of patterns produced with such films are presented.
引用
收藏
页码：361 / &
页数：5
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