LARGE PIEZOELECTRIC EFFECT IN LOW-TEMPERATURE-SINTERED LEAD-FREE (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3 THICK FILMS

被引：7

作者：

Feng, Zuyong ^{[1
,2
]}

Shi, Dongqi ^{[2
]}

Dou, Shixue ^{[2
]}

Hu, Yihua ^{[1
]}

Tang, Xingui ^{[1
]}

机构：

[1] Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510006, Guangdong, Peoples R China

[2] Univ Wollongong, Inst Superconducting & Elect Mat, N Wollongong, NSW 2500, Australia

来源：

FUNCTIONAL MATERIALS LETTERS | 2012年 / 5卷 / 03期

基金：

澳大利亚研究理事会;

关键词：

Piezoelectric properties; lead-free; thick films; low-temperature sintering; DIELECTRIC-PROPERTIES; CERAMICS;

D O I：

10.1142/S1793604712500294

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High-quality piezoelectric (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films with dense and homogenous microstructures were fabricated at a low sintering temperature (900 degrees C) using a CuBi2O4 sintering aid. The 10 mu m thick film exhibited a high longitudinal piezoelectric constant d(33,eff) of 210 pC/N with estimated unconstrained d(33) value of 560 pC/N very close to that in the corresponding bulks. Such excellent piezoelectric effect in the low-temperature sintered (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films is comparable to the case of lead-based PZT thick films, and may be a promising application in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).

引用

页数：5

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