Tracking Testing of Dynamic Errors for Linear Guideway Based on Position Sensitive Detector

The dynamic precision of linear guideway is very important performance for mechatronic equipments. The dynamic errors for the linear guideway of machine tools can reduce machining precision. In according with the advantage of high-speed response, high detection accuracy and non-contact measurement, position sensitive detector (PSD) is widely used in industrial dynamic measurement. In this paper an approach for measuring the motion stability based on PSD is proposed. The measurement system based on PSD is designed and the measurement errors are analyzed. The measurement results show the approach can measure accurately the motion stability of guideway in two dimensions with features of high precision.