High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

被引：6
|
作者：
Xu, Jun [1 ]
Li, Xin [2 ]
Duan, Jin-hua [1 ]
Xu, Hai-bo [1 ]
机构：
[1] Harbin Univ Sci & Technol, Coll Automat, Harbin 150080, Peoples R China
[2] Harbin Univ Sci & Technol, Ctr Comp, Harbin 150080, Peoples R China
来源：
JOURNAL OF ZHEJIANG UNIVERSITY-SCIENCE C-COMPUTERS & ELECTRONICS | 2013年 / 14卷 / 04期
关键词：
Tuning fork; ZY-cut quartz; Quartz micromachining; Thermal sensing; Temperature sensor; RESONATORS; PHOTOLITHOGRAPHY; DESIGN; ARRAY;
D O I：
10.1631/jzus.C12MNT05
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 A degrees C with the thermo-sensitivity of 70x10(-6)/A degrees C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.
引用
收藏
页码：264 / 273
页数：10
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