Phase measuring profilometry based on elliptically pattern grating

被引：4

作者：

Bian, Xintian ^{[1
,2
]}

Xue, Junpeng ^{[3
]}

Cheng, Ju ^{[1
,2
]}

Ji, Baowei ^{[1
,2
]}

Yu, Hualing ^{[1
,2
]}

Su, Xianyu ^{[3
]}

Chen, Wenjing ^{[3
]}

机构：

[1] Huaiyin Normal Univ, Sch Phys & Elect Elect Engn, Huaian 223300, Peoples R China

[2] Huaiyin Normal Univ, Jiangsu Key Lab Chem Low Dimens Mat, Huaian 223300, Peoples R China

[3] Sichuan Univ, Dept Optoelect, Chengdu 610064, Peoples R China

来源：

OPTIK | 2013年 / 124卷 / 19期

关键词：

Information optics; Phase measuring profilometry; Fringe analysis; Elliptically pattern grating; Phase unwrap;

D O I：

10.1016/j.ijleo.2012.11.042

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The present study proposes a new method for measuring the surface shape of an object using elliptically pattern grating projection. Based on phase measuring profilometry (PMP), elliptically pattern grating is projected on the surface of the object to measure its shape in 3D. The computing formula for solving the phase by the phase-shifting fringe method is derived, and the 3D shape formula for the altitude is reestablished. The error-contrastive analysis of the object's surface shape is re-established based on the proposed method and traditional PMP. The proposed method was shown to have a strong anti-noise ability and able to measure objects under high noise. More accurate measurement results were obtained by computer simulation and experiment to verify the feasibility of the proposed method. (C) 2013 Elsevier GmbH. All rights reserved.

引用

页码：3924 / 3928

页数：5

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